The inline diffusion/annealing automatic loading and unloading machine is a device that automatically places the pre-diffusion silicon wafer from the basket into the quartz boat, and then automatically sends it to the diffusion oven. After that, the diffused silicon wafer is automatically removed from the quartz boat to basket.

1. Speed: 12000 pcs/hr;
2. Ultra-low damage rate: ≤0.02%;
3. NG rate(synthetic defects such as suction cup prints and bracket marks): ≤0.02%;
4. Compatible with square and diamond boats;
5. Coresponding to quartz boat with 2.38~3.15 mm pitch specifications